Bruker 3D Optical Profiler FilmTek 2000 PAR-SE
- FilmTek™ 2000 PAR-SE spectroscopic ellipsometry/multi-angle reflectometry system combines cutting-edge and proprietary FilmTek technologies to deliver industry-leading accuracy, precision, and versatility for nearly any advanced thin film measurement application from R&D to production
- Its standard small spot measurement size and pattern recognition capabilities make this system ideal for characterizing patterned films and product wafers
- Uniquely able to fulfill measurement requirements outside the average thickness, resolution, and spectral ranges needed for mainstream applications and provided by standard instrumentation
- Provides exceptionally precise and repeatable thickness and refractive index measurements on ultra-thin to thin films (particularly those within multilayer stacks)
- Far more sensitive to non-uniformity in these samples than conventional ellipsometry and reflectometry tools
- Combines high-performance rotating compensator-based spectroscopic ellipsometry with our patented Multi-Angle Differential Polarimetry (MADP) and Differential Power Spectral Density (DPSD) technology, extended/wide spectral range DUV multi-angle polarized reflectometry, patented parabolic mirror optical design, and advanced Filmtek software
