Bruker TriboLab CMP
- TriboLab CMP brings a complete set of capabilities to the industry-leading TriboLab platform
- The resulting accuracy and measurement repeatability enables the highly effective qualification, inspection, and ongoing functionality testing required throughout the CMP process
- TriboLab CMP is the only process development tool on the market that can provide a broad range of polishing pressure (0.05-50 psi), speeds (1 to 500 rpm), friction, acoustic emissions, and surface temperature measurements for accurate and complete characterization of CMP processes and consumables
- Flexible parameter control: Allows tailored testing to accelerate materials development and refine processes with accuracy.
